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¼®¿µ À¯¸® Quartz Glass, Silica Glass, Fused Silica, Fused Quartz ¼ø¼öÇÑ ±Ô»ê(SiO2)À¸·Î ÀÌ·ç¾îÁø À¯¸®·Î ºÒ¼ø¹°ÀÌ ¼ö¹éppm ÀÌÇÏÀÎ °í¼øµµÀÇ ±Ô»êÀ» °í¿Â(¾à 2,000¡É ÀÌ»ó)¿¡¼­ ¿ëÀ¶ÇÏ¿© Á¦Á¶ÇÑ À¯¸®ÀÔ´Ï´Ù.
ÀϹÝÀûÀ¸·Î õ¿¬±¤¹° ÇüÅ·ΠÁ¸ÀçÇÏ´Â ¼ø¼öÇÑ ±Ô»ê ±¤¹°À» ¼®¿µ(quartz)À̶ó ÇÏ°í, À̵é Áß Åõ¸íÇÑ °áÁ¤À» ¼öÁ¤(Crystal) À̶ó°í Çϸç, ÀÌ·¯ÇÑ Àç·á¸¦ »ç¿ëÇÏ¿© °¡°øÇÑ ¿þÀÌÆÛ¸¦ Quartz wafer¶ó°í ÇÕ´Ï´Ù.

 


Chemical impurities in units of ppm (parts per million).

Absence of numbers indicates that, either the element is not present or no measurement was taken at the time.

Elements

PT
ID

Fused Quartz

Fused Silica

Electric Fused

Flame Fused

Standard

Semi Dry

Dry

Very Dry

Hydroxil

OH

5.000

1800

1,200.000

700.000

100.000

10.000

Aluminum

Al

10.000

9.000

0.100

0.020

0.001

0.001

Antimony

Sb

0.003

-

0.004

-

-

-

Arsenic

As

0.002

-

-

-

-

-

Barium

Ba

-

-

-

-

-

-

Bismuth

Bi

-

-

-

0.040

-

-

Berilium

Be

-

-

-

0.030

-

-

Bromine

Br

-

-

-

0.002

-

-

Boron

B

0.200

-

-

1.000

-

-

Cadmium

Cd

0.010

-

-

0.080

-

-

Calcium

Ca

0.400

0.600

0.100

-

> 0.001

> 0.001

Chlorine

Cl

-

-

-

-

-

-

Chromium

Cr

0.050

-

-

0.006

> 0.001

> 0.001

Cobalt

Co

-

-

-

0.001

> 0.001

> 0.001

Copper

Cu

0.050

0.030

0.010

-

> 0.001

> 0.001

Gallium

Ga

-

-

-

0.020

-

-

Germanium

Ge

-

-

-

0.060

-

-

Gold

Au

-

-

-

0.001

-

-

Hafnium

Hf

-

-

-

-

-

-

Iron

Fe

0.200

0.400

0.050

0.200

> 0.001

> 0.001

Lithium

Li

0.600

0.200

0.050

0.210

> 0.001

> 0.001

Magnesium

Mg

0.100

-

-

-

> 0.001

> 0.001

Manganese

Mn

0.050

-

-

-

-

-

Molybdenum

Mo

-

-

-

-

-

-

Nickel

Ni

0.100

-

-

-

> 0.001

> 0.001

Phosphorus

P

0.200

-

-

-

-

-

Potassium

K

0.060

0.200

0.050

-

> 0.001

> 0.001

Silver

Ag

-

-

-

-

-

-

Sodium

Na

0.700

0.600

0.050

0.023

> 0.001

> 0.001

Strontium

Sr

-

-

-

-

-

-

Thallium

Tl

-

-

-

0.050

-

-

Titanium

Ti

1.100

-

-

-

> 0.001

> 0.001

Uranium

U

-

-

-

-

-

-

Zirconium

Zr

0.800

-

-

-

-

-

Zinc

Zn

-

-

-

-

> 0.001

> 0.001


Note : Hydroxil species in the material art exhibiting high IR absorption which
provides a reliable base to calculate the OH content of the wafer.

Permeability

Quartz and Silica are impermeable for most gases. Although, Hydrogen, Deuterium and Helium does diffuse through at elevated temperatures under special processes and conditions.

The permeability constant is estimated to be approximately;

@600oC /cc/sec./cm2/mm/cm.Hg

Helium =

2.192 x 10-8

Deuterium =

1.812 x 10-9

Hydrogen =

2.110 x 10-9

 

Chemical Durability.

Quartz and Silica has exceptional durability properties against most chemicals. Exposure to chemicals will not cause visible surface change or damage.


There are two exceptions.

HF (40% solution), etching rate:

=13,000 Angstrom / min.

NaOH (30% solution), etching rate:

=5.8 Angstrom / min.

All others, etching rate:

= />1.0 Angstrom/min.

Reactivity of Quartz and Silica Toward Other Materials.
Metals
Gases
Salts
Oxides
MG,Al

Reaction @ 600¡É

No reaction
BaCL2
BaSo4

Reaction
CaO
Cuo
Fe2O3

Reaction Over 800¡É
KF

Strong Reaction
Al2O3

Reaction Over 800¡É
Si

Low Reaction
KCL

Rapid devitrification @ high temp
PbO

Strong reaction

 


Mechanical Properties

Properties

Fused Quartz

Fused Silica

Electric Fused

Flame Fused

Standard

Semi Dry

Dry

Very Dry

Density
25¡É - g/cm3

2.20

2.20

2.20

2.20

2.20

2.20

Hardness
kg/cm2

780.00

780.00

780.00

780.00

780.00

780.00

Compressibility
kg/cm2

11,500.00

11,500.00

11,500.00

11,500.00

11,500.00

11,500.00

Poisons ratio
kg/cm2

0.17

0.17

0.18

0.18

0.18

0.18

Bulk Modulus
25¡É kg/cm2

423,000.00

421,000.00

420,000.00

420,000.00

420,000.00

420,000.00

Shear(Rigidity Modules)
25¡É kg/cm2

320,000.00

318,000.00

318,000.00

320,000.00

317,000.00

317,000.00

Elasticity (Young's)Modulus
25¡É kg/cm2

744,000.00

744,000.00

744,000.00

744,000.00

744,000.00

744,000.00

Tensile Strength
25¡É kg/cm2

500.00

500.00

500.00

500.00

500.00

500.00

Bending Strength
25¡É kg/cm2

700.00

700.00

700.00

700.00

700.00

700.00

Torsional Strength
25¡É kg/cm2

500.00

300.00

300.00

300.00

300.00

300.00


Optical Properties

@Wave Length(nm)

Fused Quartz

Fused Silica

Electric Fused

Flame Fused

Standard
OH>1200ppm

Semi Dry
OH>800ppm

Dry
OH>100ppm

Very Dry
OH>10ppm

Transmittance in %

170

57.00

76.19

91.04

91.08

91.05

90.90

210

63.10

80.80

91.34

91.38

91.35

91.20

215

69.50

84.55

91.47

91.48

91.44

91.32

240

62.60

89.41

91.95

91.95

91.79

91.79

280

91.50

92.30

92.41

92.42

92.45

92.32

500

92.00

93.14

93.16

93.17

93.17

93.17

1000

93.20

93.39

93.45

93.44

93.45

93.45

2500

93.20

93.86

91.65

93.91

93.90

93.91

 


Electrical Properties

Properties

Fused Quartz

Fused Silica

Electric Fused

Flame Fused

Standard

Semi Dry

Dry

Very Dry

Dielectric Constant
25¡É @ 24Ghz

3.8

3.82

3.8

3.8

3.8

3.8

Dielectric Constant
500¡É @ 60Ghz

3.8

3.72

3.72

3.72

3.72

3.72

Dielectric Strength
@25¡É kV/cm

34

32

34

36

39

40

Dielectric Strength
@500¡É kV/cm

16

12

16

16

16

17

Loss Tangent
25¡É @ 24Ghz

1 X 10-4

3 X 10-4

3 X 10-4

3 X 10-4

3 X 10-4

3 X 10-4

Lose Tangent
25¡É @60Ghz

1 X 10-4

7 X 10-4

7 X 10-4

7 X 10-4

7 X 10-4

7 X 10-4