¢º °ßÀûÀÇ·Ú ¤Ó ¢º SPEC
Service
Thickness
Delivery
Variation
Thermal Oxidation (4"~6")
300¡Ê ~ 24,000¡Ê
1weeks
± 5%
Sputtering (4"~6")
Customerized
± 10%
°¡´É Target : Ni,Cr,Ni+Cr,Al,1%Si+Al,Ti,TiN,ITO,IZO,Pt,Au,Ta
LPCVD(Si3N4)
1,000¡Ê ~ 3,000¡Ê
Dicing
Polishing
100um ~ 500um
± 1%